Analysis and Application of MEMS Microshield Line in Millimeter Filters

Author(s): Yue He, Jingfu Bao*, Yijia Du, Junwen Jiang
School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
International Journal of Smart Grid and Clean Energy, vol. 2, no. 1, January 2013: pp. 80–85
ISSN: 2315-4462
Digital Object Identifier: 10.12720/sgce.2.1.80-85

Abstract: This paper introduces the conformal mapping method for analyzing the quais-TEM characteristic of MEMS microshield line in detail. The conformal mapping method is an accurately method based on the Schwartz-Christoffel transformation which could invert the complex structure of the microshield line to the conventional plate capacitance. In this paper, the characteristic impedance Z0 and the effect permittivity εeff of the microshield line in wide dimension range are obtained. Making use of the simulation result, three filters are designed in millimeter frequency. Furthermore, the S-parameter of the filter indicates the filter designed by the line has good performance, low insertion loss and good out-band suppression.

Keywords: Microshield line, millimeter wave, low dispersion

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